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发明名称
光阻材料及利用此光阻材料之图案形成方法
摘要
申请公布号
TWI432896
申请公布日期
2014.04.01
申请号
TW101104423
申请日期
2012.02.10
申请人
信越化学工业股份有限公司 日本
发明人
旱田山润
分类号
G03F7/004;G03F7/038;G03F7/20;G03F7/32;H01L21/027
主分类号
G03F7/004
代理机构
代理人
周良谋 新竹市东大路1段118号10楼;周良吉 新竹市东大路1段118号10楼
主权项
地址
日本
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