发明名称 |
Enhancing accuracy of fast high-resolution X-ray diffractometry |
摘要 |
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam. |
申请公布号 |
US8687766(B2) |
申请公布日期 |
2014.04.01 |
申请号 |
US201113180568 |
申请日期 |
2011.07.12 |
申请人 |
WORMINGTON MATTHEW;KROHMAL ALEXANDER;BERMAN DAVID;OPENGANDEN GENNADY;JORDAN VALLEY SEMICONDUCTORS LTD. |
发明人 |
WORMINGTON MATTHEW;KROHMAL ALEXANDER;BERMAN DAVID;OPENGANDEN GENNADY |
分类号 |
G01N23/20;G01T1/24 |
主分类号 |
G01N23/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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