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经营范围
发明名称
曝光装置
摘要
申请公布号
TWI432917
申请公布日期
2014.04.01
申请号
TW100119009
申请日期
2011.05.31
申请人
拓普康股份有限公司 日本
发明人
榎本芳幸;皆川弘英
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
林志刚 台北市中山区南京东路2段125号7楼
主权项
地址
日本
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