发明名称 |
Method and device for measuring motion error of linear stage |
摘要 |
Measurement of motion errors of a linear stage is performed to enable accurate measurement of motion errors in linear directions and a rotational direction in the linear stage using a diffraction grating. A first beam splitter splits a laser beam emitted from a light emitting unit. A first measurement unit measures a unidirectional linear motion error of the linear stage using one laser beam component split by the first beam splitter and a second measurement unit measures an angular motion error and another unidirectional linear motion of the linear stage error using a diffracted beam component obtained by diffracting another laser beam component split by the first beam splitter through the diffraction grating. A third measurement unit circularly polarizes the beam component diffracted through the diffraction grating to measure a third unidirectional linear motion error of the linear stage. |
申请公布号 |
US8687200(B2) |
申请公布日期 |
2014.04.01 |
申请号 |
US201213479933 |
申请日期 |
2012.05.24 |
申请人 |
LEE SUN-KYU;LEE CHABUM;KIM GYU HA;GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY |
发明人 |
LEE SUN-KYU;LEE CHABUM;KIM GYU HA |
分类号 |
G01B9/02;G01D5/36;G01N21/86;G01V8/00 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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