发明名称 Drawing apparatus, and method of manufacturing article
摘要 The present invention provides a drawing apparatus including a generation device configured to generate drawing data, a blanking device configured to blank a beam, and a blanking controller includes a first storage device, a second storage device, and a third storage device configured to respectively store the drawing data generated by the generation device, and being configured to control operations of the first storage device, the second storage device, and the third storage device so that an operation of storing the drawing data generated by the generation device in a selected one of the first storage device and the second storage device, and an operation of reading out the drawing data stored in the other of the first storage device and the second storage device, and storing the readout drawing data in the third storage device are executed in parallel.
申请公布号 US8686374(B2) 申请公布日期 2014.04.01
申请号 US201213606125 申请日期 2012.09.07
申请人 OHISHI SHINJI;CANON KABUSHIKI KAISHA 发明人 OHISHI SHINJI
分类号 G21K5/04 主分类号 G21K5/04
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