| 发明名称 |
Abrasive particulate material, and method of planarizing a workpiece using the abrasive particulate material |
| 摘要 |
An abrasive particulate material is disclosed that includes alumina particles. The alumina particles include a transition alumina and at least 5.0 wt % of an amorphous phase. The transition alumina particles also have a density not greater than about 3.20 g/cm3. |
| 申请公布号 |
US8685123(B2) |
申请公布日期 |
2014.04.01 |
| 申请号 |
US20050251633 |
申请日期 |
2005.10.14 |
| 申请人 |
WANG JUN;HAERLE ANDREW G.;SAINT-GOBAIN CERAMICS & PLASTICS, INC. |
发明人 |
WANG JUN;HAERLE ANDREW G. |
| 分类号 |
C09K3/14;C01F7/02 |
主分类号 |
C09K3/14 |
| 代理机构 |
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