晶圆暂存卡匣,申请号TW101101785-传众专利搜索

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发明名称	晶圆暂存卡匣
摘要
申请公布号	TWI433257	申请公布日期	2014.04.01
申请号	TW101101785	申请日期	2012.01.17
申请人	南茂科技股份有限公司新竹县新竹科学工业园区研发一路1号	发明人	唐英泰
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人	詹铭文台北市中正区罗斯福路2段100号7楼之1;叶璟宗台北市中正区罗斯福路2段100号7楼之1
主权项
地址	新竹县新竹科学工业园区研发一路1号

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