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发明名称
积体电路制程中判定缺陷的结构与方法
摘要
申请公布号
TWI433160
申请公布日期
2014.04.01
申请号
TW098131527
申请日期
2009.09.18
申请人
汉民微测科技股份有限公司 新竹市新竹科学工业园区研新一路18号5楼
发明人
萧宏
分类号
G11C29/04;H01L23/544
主分类号
G11C29/04
代理机构
代理人
蔡朝安 新竹市科学工业园区力行一路1号E之1;郑淑芬 新竹市科学工业园区力行一路1号E之1
主权项
地址
新竹市新竹科学工业园区研新一路18号5楼
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