发明名称 Semiconductor device having plural wiring layers
摘要 A semiconductor device includes a lower wiring layer, having signal lines and power supply lines extending in a Y-direction; an upper wiring layer having signal lines and power supply lines extending in an X-direction; via conductors provided in first overlap regions where corresponding signal lines overlap each other; and via conductors provided in second overlap regions where corresponding power supply lines overlap each other. The width in the X-direction of the first regions is wider than the widths in the X-direction of the second regions. Therefore, in the first regions, a plurality of via conductors can be provided. Moreover, the power supply lines are divided in the Y-direction to avoid interference with the first regions. On a plurality of lower-layer lines, two vias are placed at a minimum pitch containing one via.
申请公布号 US8686567(B2) 申请公布日期 2014.04.01
申请号 US201113298995 申请日期 2011.11.17
申请人 ENDO KIYOTAKA;ISHIZUKA KAZUTERU;FUJISAWA HIROKI 发明人 ENDO KIYOTAKA;ISHIZUKA KAZUTERU;FUJISAWA HIROKI
分类号 H01L23/52;H01L23/48;H01L29/40 主分类号 H01L23/52
代理机构 代理人
主权项
地址