发明名称 APPARATUS FOR CLEANING A WIRE AND WIRE SAWING APPARATUS AND METHOD FOR USING THE CLEANING APPARATUS
摘要 <p>According to an embodiment of the present invention, a wire cleaning device includes a first nozzle which discharges a fluid in a first direction; and a tubular member which is arranged on a moving path of a wire contaminated by slurry, moving in a second direction different from the first direction, which has a spiral guide part on the inner surface, and which cleans the wire using the fluid discharged from the moving path through the first nozzle. [Reference numerals] (140) Fluid container; (142) First temperature control unit; (160) Rotation driving unit; (170) Slurry container; (172) Filter</p>
申请公布号 KR101379801(B1) 申请公布日期 2014.04.01
申请号 KR20130009923 申请日期 2013.01.29
申请人 LG SILTRON INCORPORATED 发明人 JEON, JI WON;GONG, SOON HYUN
分类号 H01L21/301;H01L21/02 主分类号 H01L21/301
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