| 摘要 |
To improve the properties of a deposited film, the present invention provides an organic layer deposition device, an organic light emitting display device, and a method for manufacturing organic light emitting display device, comprising a moving part which fixes a substrate, is formed to move with the substrate, and has a carrier; a first transfer unit which has a receiving groove receiving both sides of the moving part to guide the movement of the moving part with the fixed substrate in a first direction and comprises a guide part including a first receiving part, a second receiving part, and a connection part connecting the first receiving part and the second receiving part; a second transfer unit which moves the moving part, from which the substrate is separated after deposition is complete, in the direction opposite to the first direction; a loading part which fixes the substrate to the moving part; a deposition part which includes a chamber maintained under vacuum and one or more organic layer deposition assemblies depositing an organic layer on the substrate fixed to the moving part transferred from the loading part; and an unloading part which separates the substrate from the moving part after the substrate is completely deposited by passing through the deposition part. The first receiving part of the guide part is arranged more close to the ground than the second receiving part. The first receiving part comprises a lower member, an upper member, and an elastic member disposed between the upper member and the lower member. The moving part moves between the first transfer unit and the second transfer unit. The substrate fixed to the moving part is separated from the organic layer deposition assembly at a predetermined interval while being moved by the first transfer unit. |
