发明名称 PHOTOMIXER AND METHOD OF MANUFACTURING THE SAME
摘要 Disclosed is a photomixer which basically solves a present lamination element in a photomixer and a PCA which is a core part of an existing broadband tera hertz spectroscopy. The photomixer includes an active layer which is formed on the upper surface of a substrate and formed in one region where light enters, and a thermal conductive layer which is formed on the upper surface of a substrate and is formed in the other region. The active layer has a mesa-type cross section. The thermal conductive layer has a flat surface by regrowing the other region with a MOCVD method.
申请公布号 KR20140038869(A) 申请公布日期 2014.03.31
申请号 KR20130032972 申请日期 2013.03.27
申请人 ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE 发明人 PARK, KYUNG HYUN;KIM, NAM JE;KO, HYUN SUNG;LEE, DONG HUN;HAN, SANG PIL;RYU, HAN CHEOL;PARK, JEONG WOO;MOON, KI WON;KIM, DAE YONG
分类号 H01S1/00;H01S3/10 主分类号 H01S1/00
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