发明名称 |
REGION SETTING DEVICE, OBSERVATION DEVICE OR INSPECTION DEVICE, REGION SETTING METHOD, AND OBSERVATION METHOD OR INSPECTION METHOD USING REGION SETTING METHOD |
摘要 |
A region-of-interest determination apparatus includes: a calculation unit and a region determination unit. The calculation unit calculates a degree of a defect based on at least a plurality of kinds of defect attribute information regarding defect data. The defect data includes an image corresponding to a defect position detected on a specimen by inspection thereof or an image corresponding to a defect position predicted to be likely to develop a defect on the specimen, where both images are obtained by imaging. The region determination unit extracts the defect data of which the degree is higher than a predetermined level, and determines the region to be observed or inspected on the specimen based on the extracted defect data. |
申请公布号 |
KR20140039075(A) |
申请公布日期 |
2014.03.31 |
申请号 |
KR20147004166 |
申请日期 |
2012.07.09 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
NAKAGAKI RYO;HIRAI TAKEHIRO;OBARA KENJI |
分类号 |
H01L21/66;G01N23/225 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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