发明名称 SEMICONDUCTOR INSPECTION AND METROLOGY SYSTEM USING LASER PULSE MULTIPLIER
摘要 A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of multi-surface reflecting components (e.g., one or more etalons and one or more mirrors). The polarizing beam splitter passes input laser pulses through the wave plate to the multi-surface reflecting components, which reflect portions of each input laser pulse back through the wave plate to the polarizing beam splitter. The polarizing beam splitter reflects each reflected portion to form an output of the pulse multiplier. The multi-surface reflecting components are configured such that the output pulses exiting the pulse multiplier have an output repetition pulse frequency rate that is at least double the input repetition pulse frequency.
申请公布号 KR20140039006(A) 申请公布日期 2014.03.31
申请号 KR20137034733 申请日期 2012.06.11
申请人 KLA-TENCOR CORPORATION 发明人 CHUANG YUNG HO;ARMSTRONG JOSEPH J.;LIOU JUSTIN DIANHUAN;DRIBINSKI VLADIMIR;BROWN DAVID L.
分类号 H01L21/66 主分类号 H01L21/66
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