METHODS, APPARATUS, AND SYSTEMS FOR CONTACTING SEMICONDUCTOR DIES THAT ARE ELECTRICALLY COUPLED TO TEST ACCESS INTERFACE POSITIONED IN SCRIBE LINES OF A WAFER

摘要

A semiconductor device includes a first wafer having i) a plurality of semiconductor dies, ii) a plurality of scribe lines adjacent one or more of the semiconductor dies, iii) a test access interface positioned in one or more of the scribe lines, wherein the test access interface has a first plurality of through-substrate conductors with a standardized physical layout, and iv) electrical couplings between at least some of the through-substrate conductors and at least one of the semiconductor dies. Methods, apparatus and systems for testing this and other types of semiconductor devices are also disclosed.