发明名称 METHOD AND DEVICE FOR POLARISING A DBD ELECTRODE
摘要 The device has a direct current source (DC) intercalated in a secondary circuit of a very high voltage transformer such that chemical species in the form of electrically positive or negative ions produced in the plasma are attracted selectively by a target substrate and repelled by the corresponding load electrodes. The source is inserted in series and parallel with a rotor of the transformer. An independent claim is also included for a method for depositing layers on inorganic substrate.
申请公布号 SI2505041(T1) 申请公布日期 2014.03.31
申请号 SI20100030469T 申请日期 2010.11.23
申请人 AGC GLASS EUROPE;LECLERCQ, JOSEPH 发明人 MICHEL ERIC;TIXHON ERIC
分类号 主分类号
代理机构 代理人
主权项
地址