发明名称 |
METHOD AND DEVICE FOR POLARISING A DBD ELECTRODE |
摘要 |
The device has a direct current source (DC) intercalated in a secondary circuit of a very high voltage transformer such that chemical species in the form of electrically positive or negative ions produced in the plasma are attracted selectively by a target substrate and repelled by the corresponding load electrodes. The source is inserted in series and parallel with a rotor of the transformer. An independent claim is also included for a method for depositing layers on inorganic substrate. |
申请公布号 |
SI2505041(T1) |
申请公布日期 |
2014.03.31 |
申请号 |
SI20100030469T |
申请日期 |
2010.11.23 |
申请人 |
AGC GLASS EUROPE;LECLERCQ, JOSEPH |
发明人 |
MICHEL ERIC;TIXHON ERIC |
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