APPARATUS FOR THIN LAYER DEPOSITION, METHOD FOR MANUFACTURING OF ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS

摘要

An organic layer deposition device according to one embodiment of the present invention, which forms an organic layer on a substrate, comprises: a deposition source which emits deposition materials; a deposition nozzle part which is arranged at one side of the deposition source and has multiple deposition source nozzles; a patterning slit sheet which is arranged to face the deposition source nozzle part and has multiple patterning slits; an electrostatic chuck which attaches and detaches the substrate; a chuck moving member which is combined with the electrostatic chuck and moves the electrostatic chuck; and a guide member which guides the moving direction of the chuck moving member. The chuck moving member includes a hook part with a variable height. The guide member has a chain part corresponding to the hook part. The chuck moving member moves along the guide member by the operation of the chain part as the hook part is inserted into the chain part. The substrate is separated from the patterning slit sheet at a predetermined interval and is relatively movable with regard to the organic layer deposition device.