发明名称 MODULAR HEATER
摘要 <p>A modular heater is disclosed, including multiple heater modules. The heater modules can include mating features, such as a tongue and groove seal, and/or soft seal, to prevent radiation, thermal convection and thermal conduction leakage. The heater module can also include heater elements, together with supports and expansion room for the heater elements.</p>
申请公布号 SG11201400321R(A) 申请公布日期 2014.03.28
申请号 SG11201400321R 申请日期 2012.09.05
申请人 EMAMI, ARSALAN 发明人 EMAMI, ARSALAN
分类号 H01L21/67;H01L21/425 主分类号 H01L21/67
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