发明名称 POLISHING COMPOSITION CONTAINING HYBRID ABRASIVE FOR NICKEL-PHOSPHOROUS COATED MEMORY DISKS
摘要 <p>The invention provides a polishing composition that contains (a) an abrasive comprising (i) first alpha alumina particles that have an average aspect ratio of 0.8:1 to 1.2:1, (ii) second alpha alumina that have an average aspect ratio of greater than 1.2:1, (iii) fumed alumina particles, and (iv) wet-process silica particles, and (b) water. The invention also provides a method of polishing a substrate, especially a nickel-phosphorous substrate, with the polishing composition.</p>
申请公布号 SG2013064589(A) 申请公布日期 2014.03.28
申请号 SG20130064589 申请日期 2013.08.27
申请人 CABOT MICROELECTRONICS CORPORATION 发明人 RUJEE LORPITTHAYA;SELVARAJ PALANISAMY CHINNATHAMBI;HARESH SIRIWARDANE
分类号 B24D3/02;C09C1/68;C09K3/14 主分类号 B24D3/02
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