发明名称 SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a semiconductor device includes a catalyst underlying layer formed on a substrate including semiconductor elements formed thereon and processed in a wiring pattern, a catalyst metal layer that is formed on the catalyst underlying layer and whose width is narrower than that of the catalyst underlying layer, and a graphene layer growing with a sidewall of the catalyst metal layer set as a growth origin and formed to surround the catalyst metal layer.
申请公布号 US2014084250(A1) 申请公布日期 2014.03.27
申请号 US201313846850 申请日期 2013.03.18
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 WADA MAKOTO;YAMAZAKI YUICHI;KAJITA AKIHIRO;ISOBAYASHI ATSUNOBU;SAITO TATSURO
分类号 H01L29/66 主分类号 H01L29/66
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