INTEGRATED DIELECTRIC WAVEGUIDE AND SEMICONDUCTOR LAYER AND METHOD THEREFOR

摘要

A method for realizing a semiconductor waveguide and an ultra-low-loss dielectric waveguide disposed on the same substrate (210) is disclosed. The method includes forming a partial dielectric waveguide structure on the substrate (210), wherein the dielectric waveguide is annealed to reduce hydrogen incorporation, and wherein the top cladding of the dielectric waveguide is only partially formed by a first dielectric layer (216). A second substrate (414) comprising a semiconductor layer having a second dielectric layer (218) disposed on its top surface is bonded to the first substrate such that the first and second dielectric layers collectively form the complete top cladding (222) for the dielectric waveguide. The second substrate (414) is then removed and the semiconductor layer is patterned to define the semiconductor waveguide core.