TEST HANDLER FOR REALIZING RAPID TEMPERATURE TRANSITION AND SEMICONDUCTOR DEVICE TEST METHOD USING THE SAME

摘要

Disclosed in the present invention are a test handler and a test method for a semiconductor element using the same. The test handler includes: chambers which provide a closed inner space for accommodating a first tray onto which semiconductor elements are loaded; a test module which electrically touches the semiconductor elements in the chambers in order to perform a test process of the semiconductor elements; and a sorting unit which loads or unloads the first tray in the chambers and sorts out semiconductor elements which are determined as faulty in the test process. The chambers may have a fluid path for circulating a coolant or a heat medium inside the walls in order to enable fast temperature switching between a first temperature below the room temperature and a second temperature above the room temperature during the test process of the semiconductor elements.