| 摘要 |
The project of the invention is to prevent a scratch caused by pollutions like polishing liquid on a saw ring by efficiently washing a seal member blocking a gap between a retainer ring and a saw ring body or a flexible connection sheet blocking a gap in the retainer ring moving up and down. The invention includes a polishing table (100) having a polishing surface (101a), a flexible connection sheet blocking a gap between a retainer ring guide (410) fixed to a saw ring body (2) and a retainer ring (3) moving up and down by the retainer ring guide (410), a saw ring (1) pressurizing a substrate (W) to the polishing surface by supporting it, and a connection sheet washing nozzle (500) washing the connection sheet (420) by directly touching a water current by spraying the water to the connection sheet (420) in a horizontal direction. |
