发明名称 |
METHOD FOR PRODUCING GROUP III-V COMPOUND CRYSTAL, METHOD FOR PRODUCING SEED CRYSTALS FORMED SUBSTRATE, GROUP III-V COMPOUND CRYSTAL, SEMICONDUCTOR DEVICE, GROUP III-V COMPOUND CRYSTAL PRODUCING APPARATUS, SEED CRYSTALS FORMED SUBSTRATE PRODUCING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for producing a group III-V compound crystal that may produce a large size group III-V compound crystal having few defects efficiently.SOLUTION: A method for producing a group III-V compound crystal 13 comprising: a seed crystals formed substrate providing step for providing a seed crystals formed substrate obtained by forming a plurality of group III-V compound seed crystals 12a on a substrate 11; a contact step for contacting the surface of the seed crystals 12a to a metal melt; and a crystal growth step for forming and growing a group III-V compound crystal 13 by reacting a group III element and a group V element in the metal melt using the seed crystals 12a as nuclei in which a plurality of the group III-V compound crystals grown from a plurality of the seed crystals 12a are joined by the growth of the group III-V compound crystal, in which a plurality of the seed crystals 12a are formed by removing a part of a group III-V compound layer 12 formed on the substrate 11 by a physical processing. |
申请公布号 |
JP2014055091(A) |
申请公布日期 |
2014.03.27 |
申请号 |
JP20120202137 |
申请日期 |
2012.09.13 |
申请人 |
OSAKA UNIV;DISCO ABRASIVE SYST LTD |
发明人 |
MORI YUSUKE;IMAIDE KAN;YOSHIMURA MASASHI;HIRAO MIHOKO;MORIKAZU YOJI;TAKEDA NOBORU;NISHINO YOKO |
分类号 |
C30B29/38;C30B19/12 |
主分类号 |
C30B29/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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