| 摘要 |
In the present invention, the following are provided: a spatial light modulation section (10) having a phase modulation surface (10a) that receives input of laser light (L1) of a wavelength region that is longer than the ultraviolet region, modulates the phase of the laser light (L1) in a plurality of regions which are arrayed two-dimensionally, and generates modulated laser light (L2); a wavelength conversion section (20) that has a light incidence surface that receives the modulated laser light (L2) output from the spatial light modulation section (10) and that converts the wavelength of the modulated laser light (L2) to the wavelength of the ultraviolet region; and an image transfer optical system (30) that combines the phase modulation surface of the spatial light modulation section (10) and the light incidence surface of the wavelength conversion section (20) so that the same become a mutually and optically coupled system. This configuration achieves a wavelength conversion-type spatial light modulation device that can output spatially phase-modulated ultraviolet laser light and reduce impact on the spatial light modulation section. |
