发明名称 SPECIMEN MEASURING METHOD
摘要 The characteristics of a specimen are measured by holding the specimen on an aperture array structure having apertures, applying an electromagnetic wave to the aperture array structure, and detecting frequency characteristics of the electromagnetic wave reflected by the aperture array structure. A liquid is directly or indirectly attached to at least a part of a first principal surface. The electromagnetic wave is applied from side including a second principal surface. The apertures of the aperture array structure have a size which does not allow the liquid to leak from the first principal surface side to the second principal surface side, and the liquid is attached to the first principal surface of the aperture array structure in a state open to an atmosphere under air pressure.
申请公布号 US2014084164(A1) 申请公布日期 2014.03.27
申请号 US201314094329 申请日期 2013.12.02
申请人 MURATA MANUFACTURING CO., LTD. 发明人 KONDO TAKASHI;KAMBA SEIJI;OGAWA YUICHI;TOMITA SAKURA
分类号 G01N21/35;G01J3/42 主分类号 G01N21/35
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