| 摘要 |
PROBLEM TO BE SOLVED: To secure both adjustment flexibility and eucentricity when acquiring an observation image and a measurement image to optimize both images.SOLUTION: An optical microscope includes: a light receiving unit 120 having an observation center axis 640 pointing toward a target object S mounted on a stage 140; projection units 110 which irradiate the target object S with light from obliquely above; and means for generating 3D shape data by processing a measurement image acquired by the light receiving unit 120 while the target object S is irradiated with the light from the projection units 110 using a predefined algorithm. Projection optical axes 642 of the projection units 110 are directed to a focal position of the light receiving unit 120. A rotation axis of a &thetas; stage 143 for rotating the target object S on the stage 140 is set to be coaxial with the observation center axis 640 of the light receiving unit 120. The rotation axis of the &thetas; stage 143 and the observation center axis 640 of the light receiving unit 120 are set to pass a point P where the focal position of the light receiving unit 120 intersects with the projection optical axes 642 of the projection units 110. |
