| 摘要 |
PROBLEM TO BE SOLVED: To provide a confocal measurement device capable of achieving high measurement accuracy.SOLUTION: A confocal measurement device 101 comprises: a light source 21 emitting light having a plurality of wavelengths; a diffraction lens 1 generating a chromatic aberration in the light from the light source 21; an objective lens 2 converging the light in which the chromatic aberration is generated on an object to be measured 200; a pinhole (optical fiber 11) through which the focused light passes; and a measurement part (a spectrometer 23 and an imaging element 24) measuring the intensity of the light for each wavelength. The diffraction lens 1 has a diffraction plane 1a in which a diffraction pattern for generating the chromatic aberration is formed, and a plane 1b located on the side opposite to the diffraction plane 1a. A circular light shieling film 4 centering on the optical axis x of the diffraction lens 1 is arranged in the plane 1b of the diffraction lens 1. |
