| 摘要 |
The present invention relates to device and method for automatically matching an impedance, in particular, device and method for automatically matching an impedance which is varied with a process requiring a Bosch process or a multi-step by having an automatic matching circuit. For the purpose, in a device which automatically matches an impedance varied with a process which requires a Bosch process or a multi-step, the present invention includes: a switching impedance converter for converting each impedance of a first process or a second process among the process requiring the Bosch process or the multi-step; a single pole double throw (SPDT) switching relay for controlling an impedance of the switching impedance converter by switching a terminal between the two terminals of the switching impedance converter according to the first process or the second process; and a variable impedance matcher which is connected to the SPDT switching relay for matching an impedance which is varied in the switching impedance converter. [Reference numerals] (101) Switching impedance converter;(105) Variable impedance matcher;(AA) Input terminal;(BB) Output terminal |
