| 摘要 |
An apparatus for inspecting a surface profile according to the present invention is to inspect a surface profile of an inspection target and includes: a light source unit, a light distribution unit, a partial reflection film, a support unit, a driving unit and a detection unit. The light source unit successively scans a plurality of wavelengths and emits light with repetitive wavelength variation and the light distribution unit delivers light from the light source unit toward the inspection target. The partial reflection film reflects first light which is a part of lights from the light distribution unit and the support unit supports the inspection target to make second light, among the lights from the light distribution unit, which is not reflected at the partial reflection film be reflected at the inspection target. The driving unit adjusts a location of at least one between the partial reflection film and support unit to make a distance between the partial reflection film and support unit smaller than a coherence length of light in order to make interference through an optical path difference between the first light and second light. The detection unit receives the first and second lights which generate an interference signal and acquires information about a surface profile of the inspection target through the interference signal. Therefore, the apparatus for inspecting a surface profile is capable of acquiring high-resolution surface profile information of an inspection target with large area in a short time. |
