EFFUSION CELL HAVING SOURCE RESIDUE DISCHARGE TYPE SHUTTER AND EVAPORATION EQUIPMENT COMPRISING SAME

摘要

Disclosed are an effusion cell having a source residue discharge type shutter and evaporation equipment comprising the same. The effusion cell having the source residue discharge type shutter according to the present invention comprises: an effusion cell body having an external container for providing a cylindrical internal space, a crucible provided in the internal space of the external container, and a heater disposed between the external container and the crucible so as to heat the crucible; and a shutter which is disposed at an outlet of the effusion cell body to open or close an outlet of the crucible, and has a plurality of flow guides disposed to extend from an area corresponding to the outlet of the crucible on an inner surface to an outer area of the external container, so as to discharge a source residue condensed on the inner surface facing the outlet of the crucible toward the outside of the external container. The evaporation equipment, according to the present invention, has the elements described above and comprises a plurality of effusion cells which are disposed to be inclined toward the center of a substrate within a vacuum chamber.