METHOD FOR PERFORMING TOMOGRAPHY ON SPECIMEN WITHIN CHARGED PARTICLE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a method for more efficiently performing transmission charged particle microscopy observation on a thin specimen.SOLUTION: A method for performing a tomography on a specimen within a charged particle microscope includes the steps of: generating an image of the specimen by irradiating the specimen on a tiltable specimen holder with charged particle beams and detecting transmission beams; acquiring a set of images each time a first set of specimens are tilted; constructing a composite image by combining a plurality of images from the set in a mathematical manner; selecting tilting for a second set of specimens; acquiring a group of spectrum maps by collecting spectrum maps of the specimens using a spectrum detector each time the second set of specimens are tilted; obtaining composition data relating to the specimens by analyzing the spectrum maps; and utilizing the composition data when constructing the composite image. The spectrum map may be acquired by using a method selected from a group of e.g., EDX, EELS and EFTEM.