METHOD FOR COINCIDENT ALIGNMENT OF LASER BEAM AND CHARGED PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method and apparatus for aligning a laser beam to coincide with a charged particle beam.SOLUTION: The invention described provides a method for aligning a laser beam so that the laser beam passes through the center of an objective lens and ultimately enters at the eucentric point of a multi-beam system. The apparatus takes advantage of components of a laser beam alignment system positioned inside and outside a vacuum chamber of a charged particle system.