| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device capable of performing positioning quickly with high accuracy even when a specific frequency of a structure constituting a device changes.SOLUTION: A positioning device has a structure including a movable part and a driving part for driving the movable part, and a controller for controlling the driving part. The controller has a model that defines a relationship between a state of the positioning device, including at least one of a position of the movable part and a posture thereof, and a specific frequency of the structure; acquires a shift of data of the state during a period in which the driving part is driven; obtains a shift of the specific frequency by inputting the shifting state data in the model; and controls the driving part so that proper vibration of the shifting specific frequency is reduced. |
