X-RAY GENERATING APPARATUS AND CONTROL METHOD FOR X-RAY GENERATING APPARATUS

摘要

An object is to emit x-rays having a plurality of different energies and to suppress variations in the energy of the created x-rays. In an x-ray generating apparatus (14) provided in an x-ray inspection apparatus (10), a particle accelerator (20) creates a charged particle beam for generating x-rays having a plurality of different energies, and x-rays are emitted by irradiating a target (22) with the charged particle beam. A single-energy control device (40) controls the particle accelerator (20) for each of the x-rays having different energies on the basis of an x-ray radiation level per unit target current obtained from a measured value of the current flowing in the target (22) and a measured value of the radiation level of x-rays emitted from the target (22), when the target (22) is irradiated with the charged particle beam.