ELECTRONIC DEVICE, METHOD OF MANUFACTURING THE SAME, AND OSCILLATOR

摘要

PROBLEM TO BE SOLVED: To provide an electronic device that keeps a covering layer defining a cavity section in which a functional element is arranged from sagging.SOLUTION: An electronic device 100 includes: a substrate 10; a cavity section 30 formed over the substrate 10 and provided with a functional element 20 arranged therein; and a covering structure 40 defining the cavity section 30. The covering structure 40 has a first surrounding wall 42 formed around the cavity section 30 over the substrate 10, a second surrounding wall 44 formed around the cavity section 30 over the first surrounding wall 42, and a covering layer 46 defining an upper surface of the cavity section 30. The second surrounding wall 44 is positioned inside the first surrounding wall 42 in a plan view.