VIBRATION ISOLATED MICRO-ELECTROMECHANICAL SYSTEM STRUCTURES, AND MANUFACTURING METHODS OF THEM

摘要

PROBLEM TO BE SOLVED: To provide a system and a method for isolating and attenuating additional and undesired vibrations in micro-electromechanical system (MEMS) device.SOLUTION: A microstructure device 200 includes an MEMS gyro 100 disposed within a suspension frame 205. The microstructure device 200 provides split-mode vibration isolation due to compliance about an output axis Y and rigidity in all other directions. In particular, the microstructure device 200 accomplishes the split mode isolation by providing bearings 215 to allow a printed circuit board 203 having the MEMS 100 mounted thereon to be compliant about the output axis Y while providing rigid connection points 210 to affix the microstructure 200 to an aircraft body. The bearings 215 essentially provide a compliant spring that can attenuate or isolate all rotational motion about the output axis Y to significantly reduce false input rotation.