| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional absolute encoder having a high resolution.SOLUTION: An encoder includes: a scale (SCL) in which a plurality of marks are arranged in a two-dimensional array; a detector (PDA(X), PDA(Y)) for performing a first detection of detecting marks of a first number arranged in a first direction over a plurality of rows, and a second detection of detecting marks of a second number arranged in a second direction over a plurality of rows; and a processing part (PRC) for obtaining an absolute position of a scale in each of the first direction and the second direction. Each mark has any of a plurality of mutually different characteristic values each of which corresponds to a combination of a first mark indicative of a position in a first direction and a second mark indicative of a position in a second direction, and the number of which is smaller than the number of the combinations. The processing part obtains an absolute position of a scale in the first direction on the basis of a result of the first detection, and an absolute position of a scale in the second direction on the basis of a result of the second detection. |
