发明名称 METHODS FOR HARDENING AMORPHOUS DIELECTRIC FILMS IN A MAGNETIC HEAD AND OTHER STRUCTURES
摘要 A method in one embodiment includes exposing a side of a dielectric layer to a beam of charged particles for converting an amorphous component of at least a portion of a dielectric layer to a crystalline state, wherein the side of the dielectric layer of extends between adjacent layers. Another method includes forming a dielectric overcoat on a media facing side of a plurality of thin films, the thin films having at least one transducer formed therein; and exposing at least a portion of the overcoat to a beam of charged particles for converting an amorphous component of the dielectric overcoat of the thin films to a crystalline state. Another method includes forming a thin film dielectric layer above a substrate; and exposing the dielectric layer to a beam of charged particles for converting an amorphous component of at least a portion of the dielectric layer to a crystalline state.
申请公布号 US2014087089(A1) 申请公布日期 2014.03.27
申请号 US201213624466 申请日期 2012.09.21
申请人 INTERNATIONAL BUSINESS MACHINES CORP;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BISKEBORN ROBERT G.;LO CALVIN S.;RETTNER CHARLES T.;RICE PHILIP M.;TOPURIA TEYA;VIRWANI KUMAR R.
分类号 B01J19/08;B05D3/06 主分类号 B01J19/08
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