| 摘要 |
PROBLEM TO BE SOLVED: To provide a system and process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million (ppm), or 10 ppm, or 1 ppm, or 100 parts per billion (ppb), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process.SOLUTION: In one aspect, there is provided a process for providing a high purity acetylene comprising 100 ppm or less of solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20°C to -50°C; and introducing the acetylene feed stream to a purifier at a temperature ranging from -50°C to 30°C to remove at least a portion of the solvent contained therein and provide the high purity acetylene. |
