发明名称 SPACER, TRANSPORTATION METHOD OF SPACER, PROCESSING METHOD, AND PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a spacer which allows for continuous transportation thereof, and to provide a transportation method of spacer, a processing method, and a processing apparatus.SOLUTION: A spacer S has a protrusion Sa formed so as to protrude from the outer peripheral side. If the spacer S is not located at a predetermined transfer position in a state where the spacer S is engaged with a transfer mechanism 41 for transferring the spacer S, the protrusion Sa comes into contact with a fixing piece 41d of the transfer mechanism 41 and moves and rotates the spacer S, when the transfer mechanism 41 holds the spacer S, thus locating the spacer S at the predetermined transfer position in a state where the spacer S is held by the transfer mechanism 41.
申请公布号 JP2014057025(A) 申请公布日期 2014.03.27
申请号 JP20120202466 申请日期 2012.09.14
申请人 TOKYO ELECTRON LTD 发明人 KOYAMA KATSUHIKO;TAKEUCHI YASUSHI
分类号 H01L21/683;C23C16/44;H01L21/205;H01L21/31;H01L21/677 主分类号 H01L21/683
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