| 摘要 |
PROBLEM TO BE SOLVED: To provide an acoustic transducer capable of reducing noise in a vent hole and making a frequency response in a low frequency domain flatter than before.SOLUTION: A chamber 35 penetrating a silicon substrate 32 in the vertical direction is opened therein. A diaphragm 33 is disposed on the top face of the silicon substrate 32 so as to cover the chamber 35. A stationary electrode film 40 is disposed above the diaphragm 33 leaving a space therebetween, the stationary electrode film 40 being supported by a protective film 39. Also, a vent hole 37 (a gap) is formed between a peripheral region of the chamber 35 on the top face of the silicon substrate 32 and an underside at ends of the diaphragm 33. In a fraction extending in a certain direction of a region where the peripheral region of the chamber 35 on the top substrate face and the underside at ends of the diaphragm 33 face each other, the height of the vent hole 37 formed between the peripheral region of the chamber 35 on the top substrate face and the underside at ends of the diaphragm 33 is narrowed. |
