| 摘要 |
PROBLEM TO BE SOLVED: To omit complicated component exchange work and to adjust a warping direction of a sheet-stuck body in which an adhesive sheet is stuck to a body to be stuck with a sheet.SOLUTION: A sheet-sticking apparatus 10 comprises: supply means 11 for supplying an adhesive sheet AS towards a face WF1 to be stuck with the adhesive sheet AS of a wafer WF which is relatively moved at a predetermined moving speed; force application means 12 for applying a pressing force to the supplied adhesive sheet AS to make it press the face WF1 to be stuck with the adhesive sheet AS; and control means 14. The force application means 12 feeds the adhesive sheet AS in a relative moving direction of the wafer WF. The control means 14 controls, with respect to the moving speed of the wafer WF, a speed of the supply means 11 supplying the adhesive sheet AS and a speed of the force application means 12 feeding the adhesive sheet AS, and adjusts a warping direction of the sheet-stuck body WFA. |
