| 摘要 |
Disclosed is an accelerometer, comprising a measuring body (1), an upper cover plate silicon wafer (2) connected to the measuring body (1) and a lower cover plate silicon wafer (3), wherein the measuring body (1) comprises a frame (11), elastic beams (12) located in the frame (11)and a mass (13), characterized in that the mass (13) is connected to the frame (11) by means of a plurality of sets of elastic beams (12); each set of the elastic beams (12) comprises two elastic folding beams (121), with the elastic folding beams (121) being symmetrically arranged in relation to the centre line of the mass (13); and each set of elastic folding beams (121) are connected to each other via a connecting arm (122). |
