NANO-PATTERNED SUBSTRATE AND EPITAXIAL STRUCTURE CROSS-REFERENCE TO RELATED APPLICATION

摘要

A nano-patterned substrate includes a substrate and a plurality of nano-structures. The substrate has an upper surface and each of the plurality of nano-structures comprises a semiconductor buffer region and a buffer region formed on the upper surface of the substrate, wherein one of the pluralities of nano-structures has a ratio of height to diameter greater than 1, and an arc-shaped top surface.