CHIP SUPPORT SUBSTRATE, METHOD FOR SUPPORTING CHIP, THREE-DIMENSIONAL INTEGRATED CIRCUIT, ASSEMBLY DEVICE, AND METHOD FOR MANUFACTURING THREE-DIMENSIONAL INTEGRATED CIRCUIT

摘要

The present invention is a chip support substrate provided with a lyophilic region (4) formed on the substrate and holding a chip (3A) using suction, and an electrode (6) formed within the lyophilic region on the substrate, and used for generating electrostatic force on the chip. The present invention is also a method for supporting a chip including: a step for positioning the chip in a lyophilic region of a chip support substrate provided with the lyophilic region, which is formed on the substrate, and an electrode formed within the lyophilic region on the substrate, a fluid (15) being interposed between the chip and the lyophilic region; and a step for generating an electrostatic force on the chip corresponding to the electrode by applying voltage to the electrode.