发明名称 |
METHOD AND APPARATUS FOR SEPARATING WORKPIECES |
摘要 |
<p>The invention is an apparatus, for performing the method, and the method including the steps of providing a workpiece, contacting a portion of an exterior surface of the workpiece to an acoustic couplant such that an interface between the acoustic couplant and the portion of the exterior surface is at least substantially continuous across the portion of the exterior surface, and propagating a crack through the workpiece. A portion of the acoustic couplant at the interface has acoustic impedance relative to the acoustic energy that is greater than 400 kg·m-2·s-1.</p> |
申请公布号 |
WO2014047571(A1) |
申请公布日期 |
2014.03.27 |
申请号 |
WO2013US61210 |
申请日期 |
2013.09.23 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
ZHANG, HAIBIN;SIMENSON, GLENN;XU, QIAN;MATSUMOTO, HISASHI |
分类号 |
C03B33/02;B65H3/00 |
主分类号 |
C03B33/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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