发明名称 METHODS AND ARRANGEMENT FOR CREATING A HIGHLY EFFICIENT DOWNSTREAM MICROWAVE PLASMA SYSTEM
摘要 A plasma system is disclosed. The plasma system includes a microwave waveguide assembly having a longitudinal axis parallel with a first axis. The plasma system also includes a plasma tube assembly intersecting the microwave waveguide assembly. The plasma tube assembly has a longitudinal axis parallel with a second axis that is substantially orthogonal with the first axis. The plasma tube assembly also has a plasma-sustaining region defined by an upstream plurality of plasma traps and a downstream plurality of plasma traps.
申请公布号 KR101378198(B1) 申请公布日期 2014.03.26
申请号 KR20087018184 申请日期 2006.12.20
申请人 发明人
分类号 C23C16/455;C23F1/00 主分类号 C23C16/455
代理机构 代理人
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