发明名称 SILICA VESSEL FOR PULLING MONOCRYSTALLINE SILICON AND METHOD FOR PRODUCING SAME
摘要 The present invention is directed to a single-crystal silicon pulling silica container, the silica container including a straight body portion, a curved portion, and a bottom portion, wherein the OH group concentration in the straight body portion is 30 to 300 ppm by mass, the OH group concentration in the bottom portion is 30 ppm by mass or less, and the difference in the OH group concentration between the straight body portion and the bottom portion is 30 ppm by mass or more. As a result, a low-cost single-crystal silicon pulling silica container, the silica container that can reduce cavity defects called voids and pinholes in pulled single crystal silicon, is provided.
申请公布号 EP2711446(A1) 申请公布日期 2014.03.26
申请号 EP20120864795 申请日期 2012.11.08
申请人 SHIN-ETSU QUARTZ PRODUCTS CO., LTD. 发明人 YAMAGATA, Shigeru
分类号 C30B29/06;C03B20/00;C30B15/10 主分类号 C30B29/06
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