发明名称 |
METHOD AND DEVICE FOR NON-CONTACT MEASURING SURFACES |
摘要 |
A slit m is projected onto an object surface in which reference point X1 is in a horizontal axis x closest to best in focus position P. One image of a field of view area F is acquired after reflection of light comprising said reference point X1. Position Z1 of the object in a vertical axis z is determined. Images of respective field of view areas F are acquired after reflection of light having reference points X2, X3 . . . Xn by simultaneously moving the object along axis z to maintain reference points X2, X3 . . . Xn closest to best in focus position P. Positions Z2, Z3 . . . Zn in which images were acquired are determined. The best in focus position P along horizontal axis x is determined for each image. A correction differential Delta1, Delta2 . . . Deltan between best in focus position P and reference points X1, X2 . . . Xn is calculated. |
申请公布号 |
EP2710330(A1) |
申请公布日期 |
2014.03.26 |
申请号 |
EP20110722379 |
申请日期 |
2011.05.20 |
申请人 |
UNIVERSITAT POLITECNICA DE CATALUNYA |
发明人 |
LAGUARTA BERTRAN, FERRAN;PINTÓ VILA, AGUSTÍ;ARTIGAS PURSALS, ROGER;CADEVALL ARTIGUES, CRISTINA |
分类号 |
G01B11/25;G01B11/24;G01M11/02;G02B21/00;G02B21/06 |
主分类号 |
G01B11/25 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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